DSR1

Desk Sputter Coater DSR1
The Desk SEM Coater model DSR1 is a compact coating system able to coat noble metals such as gold (Au), palladium (Pd), platinum (Pt) and gold/palladium (Au/Pd) thin films on non-conductive or poorly conductive specimens. Uniform thin films with fine-grain sizes are formed in a fast cycle time. The produced thin film is suitable for scanning electron microscopy (SEM) analysis. 

The Desk Magnetron Sputter Coater (DSR1) is a high productivity tool that delivers consistent and highly repeatable results in the fully automated system.

The good design and small footprint of the DSR1 SEM coating system allows easy use of the system.

DSR1, the modular of SEM sample preparation system, configured as a sputter coater and carbon coater (thread) with interchangeable heads in one instrument

Features

  •  Two-stage, direct drive 14m3/h, rotary vane pump
  •  High precision quartz crystal thickness monitor.
  •  Intuitive touch screen to control the coating process and rapid data input
  •  User friendly software that can be updated via network
  •  Control coating rate to achieve finer grain structures
  •  Manual or automatic Timed and Thickness sputtering.
  •  Easy-to-change specimen stages (rotation stage as standard)
  •  Two-year warranty
  •    CE conformity

 


DSR1

Applications

The DSR1 is a Scanning Electron Microscope (SEM) sample preparation system equipped with a rotary pump to achieve vacuum less than 50 mtorr which is a suitable vacuum range for noble metals sputter coating and carbon fiber evaporation coating.

Note: For sputtering of oxidizing metals, field emission FE-SEM and for TEM application, please see the DST1 (Turbo-pumped desk sputter coater) and DCT (Turbo-pumped carbon coater).





Touch screen control with colorful display

 

DSR1, the desk sputter coater, is equipped with a 7'' colored touch screen and full automatic control and data input that can be operated by even inexperienced users. The vacuum, current and deposition information can be observed as digital data or curves on the touch screen. Information of the last 300 coating can also be saved in the history page.


  Touch screen control with colorful display

 

Sample Stages

   

The DSR1 can be equipped with different sample stage configurations depending on the user requirements. The sample stages are rotatable with adjustable height and can be changed easily.

The rotary planetary sample stage is a good choice for uniform coating of porous specimens.

 

 Sample Stages


Specification

  • 170 mm OD x 140 mm Pyrex cylinder chamber.
  • Dimensions: 45 Cm H x 50 Cm W x 37 Cm D.
  • Shipping Weight: 42Kg.
  • Utilities: 220V-50Hz - 10A.
  • 80 Watt DC switching power supply.
  • Ultimate Vacuum: Less than 50 millitorr.
  • 2 inches magnetron cathode.
  • Electronic shutter.
  • Precision metering valve in order to control the vacuum pressure.
  • Transfer the curves and sputtering process data by USB port to PC. 

Options and Accessories
  • The DSR1 has the flowing options and accessories:
  • Carbon fiber evaporation head
  • High current power supply
  • Quartz crystal
  • Sample rotation
  • Spare glass
  • Sputtering targets
  • Fiber carbon