VCS100F

 

VCS100F_cathode_magnetron

 


 

Our system is the most improved system in the world and has following technical detail.

VCS100F is a Vacuum Sputtering and Thermal Coating System.


 VCS100F
  • Two cathode magnetron with 3 degrees of freedom adjustment.
  • DC power supply with automatic matching box.
  • Thermal evaporation platform with 300 A current.
  • Boat holder and current display.
  • Double layers water-cooled vacuum chamber.
  • Turbomolecular pump for high vacuum.
  • Backup the rotary pump.
  • Smart valve for turbopump with a touchscreen monitor.
  • Electro-pneumatic valves.
  • Crystal thickness monitor with 1nm resolution and 4 sensor holder.
  • Substrate holder with electronic shutter and electronic feedthrough four Magnetron.
  • Two-stage backup rotary pump.
  • Smart valve for turbopump.Touch screen interface.
  • Quartz crystal thickness monitor with 1 nm resolution and 4 sensor holder.
  • Customizable.



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